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AS ISO 14644.3:2021
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AS ISO 14644.3:2021 Cleanrooms and associated controlled environments Test methods
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Identically adopts ISO 14644 3:2019, which provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions. KEYWORDS: Cleanrooms; Controlled environments; Attributes; Test method
R00000284
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AS ISO 14644.3:2021 Cleanrooms and associated controlled environments Test methods